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Author(s): L. A. Rocha
Lukas Mol
Edmond Cretu
Reinoud F. Wolffenbuttel
José Machado da Silva
Title: Capacitive MEMS accelerometers testing mechanism for auto-calibration and long-term diagnostics
Issue Date: 2007
Abstract: A test technique for capacitive MEMSaccelerometers and electrostatic micro-actuators based onthe measurement of pull-in voltages is described. Acombination of pull-in voltages and resonance frequencymeasurements can be used for the estimation of processinducedvariations in device dimensions from layout anddeviations in material properties from nominal value,which enables auto-calibration. Preliminary measurementson fabricated devices confirm the validity of the proposedtechnique. Moreover, long-term pull-in measurements haveindicated the suitability of the approach as in-systemdiagnostic tool.
Subject: Micro-sistemas, Outras ciências da engenharia e tecnologias
Microsystems, Other engineering and technologies
Scientific areas: Ciências da engenharia e tecnologias::Outras ciências da engenharia e tecnologias
Engineering and technology::Other engineering and technologies
Source: 13th International Mixed Signals Testing Workshop and 3rd GHz/Gbps Test Workshop (IMSTW / GTW 2007)
Document Type: Artigo em Livro de Atas de Conferência Internacional
Rights: openAccess
Appears in Collections:FEUP - Artigo em Livro de Atas de Conferência Internacional

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