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https://hdl.handle.net/10216/71515| Author(s): | L. A. Rocha Lukas Mol Edmond Cretu Reinoud F. Wolffenbuttel José Machado da Silva |
| Title: | Capacitive MEMS accelerometers testing mechanism for auto-calibration and long-term diagnostics |
| Issue Date: | 2007 |
| Abstract: | A test technique for capacitive MEMSaccelerometers and electrostatic micro-actuators based onthe measurement of pull-in voltages is described. Acombination of pull-in voltages and resonance frequencymeasurements can be used for the estimation of processinducedvariations in device dimensions from layout anddeviations in material properties from nominal value,which enables auto-calibration. Preliminary measurementson fabricated devices confirm the validity of the proposedtechnique. Moreover, long-term pull-in measurements haveindicated the suitability of the approach as in-systemdiagnostic tool. |
| Subject: | Micro-sistemas, Outras ciências da engenharia e tecnologias Microsystems, Other engineering and technologies |
| Scientific areas: | Ciências da engenharia e tecnologias::Outras ciências da engenharia e tecnologias Engineering and technology::Other engineering and technologies |
| URI: | https://repositorio-aberto.up.pt/handle/10216/71515 |
| Source: | 13th International Mixed Signals Testing Workshop and 3rd GHz/Gbps Test Workshop (IMSTW / GTW 2007) |
| Document Type: | Artigo em Livro de Atas de Conferência Internacional |
| Rights: | openAccess |
| License: | https://creativecommons.org/licenses/by-nc/4.0/ |
| Appears in Collections: | FEUP - Artigo em Livro de Atas de Conferência Internacional |
This item is licensed under a Creative Commons License
