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https://hdl.handle.net/10216/71515
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DC Field | Value | Language |
---|---|---|
dc.creator | L. A. Rocha | |
dc.creator | Lukas Mol | |
dc.creator | Edmond Cretu | |
dc.creator | Reinoud F. Wolffenbuttel | |
dc.creator | José Machado da Silva | |
dc.date.accessioned | 2019-02-04T00:53:14Z | - |
dc.date.available | 2019-02-04T00:53:14Z | - |
dc.date.issued | 2007 | |
dc.identifier.other | sigarra:58552 | |
dc.identifier.uri | https://repositorio-aberto.up.pt/handle/10216/71515 | - |
dc.description.abstract | A test technique for capacitive MEMSaccelerometers and electrostatic micro-actuators based onthe measurement of pull-in voltages is described. Acombination of pull-in voltages and resonance frequencymeasurements can be used for the estimation of processinducedvariations in device dimensions from layout anddeviations in material properties from nominal value,which enables auto-calibration. Preliminary measurementson fabricated devices confirm the validity of the proposedtechnique. Moreover, long-term pull-in measurements haveindicated the suitability of the approach as in-systemdiagnostic tool. | |
dc.language.iso | eng | |
dc.relation.ispartof | 13th International Mixed Signals Testing Workshop and 3rd GHz/Gbps Test Workshop (IMSTW / GTW 2007) | |
dc.rights | openAccess | |
dc.rights.uri | https://creativecommons.org/licenses/by-nc/4.0/ | |
dc.subject | Micro-sistemas, Outras ciências da engenharia e tecnologias | |
dc.subject | Microsystems, Other engineering and technologies | |
dc.title | Capacitive MEMS accelerometers testing mechanism for auto-calibration and long-term diagnostics | |
dc.type | Artigo em Livro de Atas de Conferência Internacional | |
dc.contributor.uporto | Faculdade de Engenharia | |
dc.subject.fos | Ciências da engenharia e tecnologias::Outras ciências da engenharia e tecnologias | |
dc.subject.fos | Engineering and technology::Other engineering and technologies | |
Appears in Collections: | FEUP - Artigo em Livro de Atas de Conferência Internacional |
This item is licensed under a Creative Commons License