Please use this identifier to cite or link to this item:
https://hdl.handle.net/10216/71536| Author(s): | L. A. Rocha Lukas Mol Edmond Cretu Reinoud F. Wolffenbuttel José Machado da Silva |
| Title: | Auto-calibrated capacitive MEMS accelerometer |
| Issue Date: | 2008 |
| Abstract: | An electronic calibration technique for capacitive MEMS accelerometers based on the measurement of pull-in voltages is described. A combination of pull-in voltages and resonance frequency measurements can be used for the estimation of processinduced variations in device dimensions from layout and deviations in material properties from nominal value, which enables auto-calibration. Measurements on fabricated devices confirm the validity of the proposed technique and electronic calibration is experimentally demonstrated. |
| Subject: | Outras ciências da engenharia e tecnologias Other engineering and technologies |
| Scientific areas: | Ciências da engenharia e tecnologias::Outras ciências da engenharia e tecnologias Engineering and technology::Other engineering and technologies |
| URI: | https://hdl.handle.net/10216/71536 |
| Source: | 14th IEEE International Mixed-Signals, Sensors and Systems Test Workshop - IMSTW 2008 |
| Document Type: | Artigo em Livro de Atas de Conferência Internacional |
| Rights: | openAccess |
| License: | https://creativecommons.org/licenses/by-nc/4.0/ |
| Appears in Collections: | FEUP - Artigo em Livro de Atas de Conferência Internacional |
This item is licensed under a Creative Commons License
