Please use this identifier to cite or link to this item:
https://hdl.handle.net/10216/71536Full metadata record
| DC Field | Value | Language |
|---|---|---|
| dc.creator | L. A. Rocha | |
| dc.creator | Lukas Mol | |
| dc.creator | Edmond Cretu | |
| dc.creator | Reinoud F. Wolffenbuttel | |
| dc.creator | José Machado da Silva | |
| dc.date.accessioned | 2022-09-09T19:37:59Z | - |
| dc.date.available | 2022-09-09T19:37:59Z | - |
| dc.date.issued | 2008 | |
| dc.identifier.other | sigarra:58553 | |
| dc.identifier.uri | https://hdl.handle.net/10216/71536 | - |
| dc.description.abstract | An electronic calibration technique for capacitive MEMS accelerometers based on the measurement of pull-in voltages is described. A combination of pull-in voltages and resonance frequency measurements can be used for the estimation of processinduced variations in device dimensions from layout and deviations in material properties from nominal value, which enables auto-calibration. Measurements on fabricated devices confirm the validity of the proposed technique and electronic calibration is experimentally demonstrated. | |
| dc.language.iso | eng | |
| dc.relation.ispartof | 14th IEEE International Mixed-Signals, Sensors and Systems Test Workshop - IMSTW 2008 | |
| dc.rights | openAccess | |
| dc.rights.uri | https://creativecommons.org/licenses/by-nc/4.0/ | |
| dc.subject | Outras ciências da engenharia e tecnologias | |
| dc.subject | Other engineering and technologies | |
| dc.title | Auto-calibrated capacitive MEMS accelerometer | |
| dc.type | Artigo em Livro de Atas de Conferência Internacional | |
| dc.contributor.uporto | Faculdade de Engenharia | |
| dc.subject.fos | Ciências da engenharia e tecnologias::Outras ciências da engenharia e tecnologias | |
| dc.subject.fos | Engineering and technology::Other engineering and technologies | |
| Appears in Collections: | FEUP - Artigo em Livro de Atas de Conferência Internacional | |
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