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Author(s): L. A. Rocha
L. Mol
E. Cretu
R. F. Wolffenbuttel
J. Machado da Silva
Title: A Pull-in Based Test Mechanism for Device Diagnostic and Process Characterization
Issue Date: 2008
Abstract: A test technique for capacitive MEMS accelerometers and electrostatic microactuators, based on the measurement of pull-involtages and resonance frequency, is described. Using this combination of measurements, one can estimate process-inducedvariations in the device layout dimensions as well as deviations from nominal value in material properties, which can be usedeither for testing or device diagnostics purposes. Measurements performed on fabricated devices conrm that the 250 nm overetchobserved on SEM images can be correctly estimated using the proposed technique.
Subject: Outras ciências da engenharia e tecnologias
Other engineering and technologies
Scientific areas: Ciências da engenharia e tecnologias::Outras ciências da engenharia e tecnologias
Engineering and technology::Other engineering and technologies
Document Type: Artigo em Revista Científica Internacional
Rights: openAccess
Appears in Collections:FEUP - Artigo em Revista Científica Internacional

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