Please use this identifier to cite or link to this item:
https://hdl.handle.net/10216/57143| Author(s): | L. A. Rocha L. Mol E. Cretu R. F. Wolffenbuttel J. Machado da Silva |
| Title: | A Pull-in Based Test Mechanism for Device Diagnostic and Process Characterization |
| Issue Date: | 2008 |
| Abstract: | A test technique for capacitive MEMS accelerometers and electrostatic microactuators, based on the measurement of pull-involtages and resonance frequency, is described. Using this combination of measurements, one can estimate process-inducedvariations in the device layout dimensions as well as deviations from nominal value in material properties, which can be usedeither for testing or device diagnostics purposes. Measurements performed on fabricated devices conrm that the 250 nm overetchobserved on SEM images can be correctly estimated using the proposed technique. |
| Subject: | Outras ciências da engenharia e tecnologias Other engineering and technologies |
| Scientific areas: | Ciências da engenharia e tecnologias::Outras ciências da engenharia e tecnologias Engineering and technology::Other engineering and technologies |
| DOI: | 10.1155/2008/283451 |
| URI: | https://repositorio-aberto.up.pt/handle/10216/57143 |
| Document Type: | Artigo em Revista Científica Internacional |
| Rights: | openAccess |
| License: | https://creativecommons.org/licenses/by-nc/4.0/ |
| Appears in Collections: | FEUP - Artigo em Revista Científica Internacional |
Files in This Item:
| File | Description | Size | Format | |
|---|---|---|---|---|
| 60948.pdf | VLSI Design - Hindawi Publishing Corporation | 2.01 MB | Adobe PDF |  View/Open |
This item is licensed under a Creative Commons License
