Please use this identifier to cite or link to this item:
https://hdl.handle.net/10216/157649| Author(s): | Sara Falcão Alves |
| Title: | Development and Implementation of a Multi Observation Study as a Wafer Preparation Area Diagnostic Tool |
| Issue Date: | 2024-02-09 |
| Subject: | Engenharia mecânica Mechanical engineering |
| Scientific areas: | Ciências da engenharia e tecnologias::Engenharia mecânica Engineering and technology::Mechanical engineering |
| DOI: | 10.34626/vj1r-2c45 |
| TID identifier: | 203861744 |
| URI: | https://hdl.handle.net/10216/157649 |
| Document Type: | Dissertação |
| Rights: | embargoedAccess |
| Embargo End Date: | 2027-02-08 |
| Appears in Collections: | FEUP - Dissertação |
Files in This Item:
| File | Description | Size | Format | |
|---|---|---|---|---|
| 663983.pdf Restricted Access | Development and Implementation of a Multi Observation Study as a Wafer Preparation Area Diagnostic Tool | 15.66 MB | Adobe PDF | View/Open |
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