Development and Implementation of a Multi Observation Study as a Wafer Preparation Area Diagnostic Tool

Please use this identifier to cite or link to this item: https://hdl.handle.net/10216/157649

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DC Field	Value	Language
dc.creator	Sara Falcão Alves
dc.date.accessioned	2025-11-13T11:36:41Z	-
dc.date.available	2025-11-13T11:36:41Z	-
dc.date.issued	2024-02-09
dc.date.submitted	2024-03-05
dc.identifier.other	sigarra:663983
dc.identifier.uri	https://hdl.handle.net/10216/157649	-
dc.language.iso	eng
dc.rights	embargoedAccess
dc.subject	Engenharia mecânica
dc.subject	Mechanical engineering
dc.title	Development and Implementation of a Multi Observation Study as a Wafer Preparation Area Diagnostic Tool
dc.type	Dissertação
dc.date.embargo	2027-02-08
dc.contributor.uporto	Faculdade de Engenharia
dc.identifier.doi	10.34626/vj1r-2c45
dc.identifier.tid	203861744
dc.subject.fos	Ciências da engenharia e tecnologias::Engenharia mecânica
dc.subject.fos	Engineering and technology::Mechanical engineering
thesis.degree.discipline	Mestrado em Engenharia Mecânica
thesis.degree.grantor	Faculdade de Engenharia
thesis.degree.grantor	Universidade do Porto
thesis.degree.level	1
rcaap.embargofct	Confidencialidade da empresa.
Appears in Collections:	FEUP - Dissertação

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