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Author(s): José C. S. Costa
Rui M. Rocha
Inês C. M. Vaz
Manuel C. Torres
Adélio Mendes
Luis M. N. B. F. Santos
Title: Description and test of a new multilayer thin film vapor deposition apparatus for organic semiconductor materials
Issue Date: 2015
Abstract: In this work the description, test, and performance of a new vacuum apparatus for thin film vapor deposition(ThinFilmVD) of organic semiconductor materials are presented. The apparatus is able to fabricate single, multilayer/composites, or hybrid thin films using four independent, organicor inorganic, vapor deposition sources (Knudsen cells type), andthe vapor mass flow is condensed onto a substrate surface(temperature regulated). The same apparatus could be also usedto measure vapor pressures according to the Knudsen effusionmethodology. Vapor pressures and thermodynamic properties ofsublimation measured by Knudsen effusion of some referenceorganic materials (benzoic acid, anthracene, triphenylene,benzanthrone, 1,3,5-triphenylbenzene, perylene) were used toevaluate and test the performance of the apparatus. Moreover, nanostructures of thin films and composite materials of relevantcharge transport and electroluminescent materials were deposited onto an indium−tin oxide (ITO) surface, and the morphologyand thin film thickness were evaluated by scanning electron microscopy (SEM), exploring the effect of different mass flow ratesand deposition time. The new physical vapor deposition apparatus based in four Knudsen effusion cells with an accurate massflow control was designed to assemble well-defined (composition, morphology, thickness) thin films of organic semiconductorsbased on their volatility. The described apparatus presents a high versatility to the fabrication of single/multilayer thin films, asgrown crystals, and hybrid micro- and nanostructured materials
Subject: Ciências Tecnológicas
Technological sciences
Related Information: info:eu-repo/grantAgreement/FCT - Fundação para a Ciência e Tecnologia/Projetos Estratégicos/UID/EQU/00511/2013 - POCI-01-0145-FEDER-006939/Laboratório de Engenharia de Processos, Ambiente, Biotecnologia e Energia/LEPABE
info:eu-repo/grantAgreement/FCT - Fundação para a Ciência e Tecnologia/Projectos de I&DT em Todos os Domínios Científicos/PTDC/AAC-AMB/121161/2010/Terpenos e Terpenoides: Propriedades Físico-Químicas para a Previsão do Destino de Compostos Biogenicos Organicos Voláteis no Ambiente/121161_2010
Document Type: Artigo em Revista Científica Internacional
Rights: restrictedAccess
Appears in Collections:FCUP - Artigo em Revista Científica Internacional
FEUP - Artigo em Revista Científica Internacional

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